화학공학소재연구정보센터
검색결과 : 7건
No. Article
1 Selective and Blanket Electroless Copper Deposition for Ultralarge Scale Integration
Dubin VM, Shachamdiamand Y, Zhao B, Vasudev PK, Ting CH
Journal of the Electrochemical Society, 144(3), 898, 1997
2 Simulation of Electroless Deposition of Cu Thin-Films for Very Large-Scale Integration Metallization
Smy T, Tan L, Dew SK, Brett MJ, Shachamdiamand Y, Desilva M
Journal of the Electrochemical Society, 144(6), 2115, 1997
3 High-Aspect-Ratio Microtunnel Technique to Empirically Model Electroless Deposition
Desilva M, Shachamdiamand Y, Soave R, Kim HS
Journal of the Electrochemical Society, 143(4), L78, 1996
4 A Novel Seed Layer Scheme to Protect Catalytic Surfaces for Electroless Deposition
Desilva MJ, Shachamdiamand Y
Journal of the Electrochemical Society, 143(11), 3512, 1996
5 Rapid Thermal-Diffusion of Sn from Spin-on-Glass into GaAs
Hernandes CS, Swart JW, Pudenzi MA, Kraus GT, Shachamdiamand Y, Giannelis EP
Journal of the Electrochemical Society, 142(8), 2829, 1995
6 A Novel Technique for Characterizing the Surface Coverage of Thin-Film Chemical-Vapor-Deposition in Ultra-High-Aspect-Ratio Microstructures
Soave RJ, Tasker GW, Then AM, Mayer JW, Shachamdiamand Y
Journal of Vacuum Science & Technology A, 13(3), 1027, 1995
7 Electroless Copper Deposition for ULSI
Shachamdiamand Y, Dubin V, Angyal M
Thin Solid Films, 262(1-2), 93, 1995