검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Sputter-Deposition of Tantalum-Nitride Films on Copper Using an RF-Plasma Walter KC, Fetherston RP, Sridharan K, Chen A, Shamim MM, Conrad JR Materials Research Bulletin, 29(8), 827, 1994 |
| No. | Article |
|---|---|
| 1 |
Sputter-Deposition of Tantalum-Nitride Films on Copper Using an RF-Plasma Walter KC, Fetherston RP, Sridharan K, Chen A, Shamim MM, Conrad JR Materials Research Bulletin, 29(8), 827, 1994 |