검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Improving stress stability in low-pressure chemical vapor deposited silicon dioxide films by ion implantation Shang HP, Fu JY, Xie CQ, Li ZG, Chen DP Thin Solid Films, 598, 103, 2016 |
| No. | Article |
|---|---|
| 1 |
Improving stress stability in low-pressure chemical vapor deposited silicon dioxide films by ion implantation Shang HP, Fu JY, Xie CQ, Li ZG, Chen DP Thin Solid Films, 598, 103, 2016 |