검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Role of Gas-Phase Reactions in Subatmospheric Chemical-Vapor-Deposition Ozone/Teos Processes for Oxide Deposition Shareef IA, Rubloff GW, Bill WN Journal of Vacuum Science & Technology B, 14(2), 772, 1996 |
| 2 |
Subatmospheric Chemical-Vapor-Deposition Ozone/Teos Process for SiO2 Trench Filling Shareef IA, Rubloff GW, Anderle M, Gill WN, Cotte J, Kim DH Journal of Vacuum Science & Technology B, 13(4), 1888, 1995 |