검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
An investigation of phosphate based ECMP electrolyte performance on feature scale planarization Shattuck KG, West AC Journal of Applied Electrochemistry, 39(10), 1719, 2009 |
| 2 |
Characterization of phosphate electrolytes for use in Cu electrochemical mechanical planarization Shattuck KG, Lin JY, Cojocaru P, West AC Electrochimica Acta, 53(28), 8211, 2008 |
| 3 |
Controlling crystal orientation in microporous titanosilicate ETS-4 films by secondary growth method Yilmaz B, Shattuck KG, Warzywoda J, Sacco A Journal of Materials Science, 41(10), 3135, 2006 |