검색결과 : 1건
No. | Article |
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1 |
Analysis of closed loop control and sensor for a reactive sputtering drum coater George MA, Craves EA, Shehab R, Knox K Journal of Vacuum Science & Technology A, 22(4), 1804, 2004 |
No. | Article |
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1 |
Analysis of closed loop control and sensor for a reactive sputtering drum coater George MA, Craves EA, Shehab R, Knox K Journal of Vacuum Science & Technology A, 22(4), 1804, 2004 |