검색결과 : 2건
No. | Article |
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1 |
CAPs: Well worth the effort Sheridan D Chemical Week, 165(36), 3, 2003 |
2 |
Etching of 6H-SiC and 4H-SiC Using NF3 in a Reactive Ion Etching System Casady JB, Luckowski ED, Bozack M, Sheridan D, Johnson RW, Williams JR Journal of the Electrochemical Society, 143(5), 1750, 1996 |