검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Measurements of Pulsed-Power Modulated Argon Plasmas in an Inductively-Coupled Plasma Source Ashida S, Shim MR, Lieberman MA Journal of Vacuum Science & Technology A, 14(2), 391, 1996 |
| No. | Article |
|---|---|
| 1 |
Measurements of Pulsed-Power Modulated Argon Plasmas in an Inductively-Coupled Plasma Source Ashida S, Shim MR, Lieberman MA Journal of Vacuum Science & Technology A, 14(2), 391, 1996 |