검색결과 : 1건
No. | Article |
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Study of hafnium oxide thin films deposited by RF magnetron sputtering under glancing angle deposition at varying target to substrate distance Haque SM, Rao KD, Misal JS, Tokas RB, Shinde DD, Ramana JV, Rai S, Sahoo NK Applied Surface Science, 353, 459, 2015 |