검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Chemical-mechanical polishing of SiOC organosilicate glasses: the effect of film carbon content Borst CL, Korthuis V, Shinn GB, Luttmer JD, Gutmann RJ, Gill WN Thin Solid Films, 385(1-2), 281, 2001 |
| 2 |
Optimization of the chemical mechanical polishing process for premetal dielectrics Fang SJ, Garza S, Guo HL, Smith TH, Shinn GB, Campbell JE, Hartsell RL Journal of the Electrochemical Society, 147(2), 682, 2000 |
| 3 |
On-line patterned wafer thickness control of chemical-mechanical polishing Smith TH, Fang SJ, Stefani JA, Shinn GB, Boning DS, Butler SW Journal of Vacuum Science & Technology A, 17(4), 1384, 1999 |