검색결과 : 1건
No. | Article |
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1 |
Ethanol-addition-enhanced, chemical vapor deposited tantalum oxide films from Ta(OC2H5)(5) and oxygen precursors Shinriki H, Sugiura M, Liu Y, Shimomura K, Nakajima T Journal of the Electrochemical Society, 145(9), 3247, 1998 |