검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Moisture requirements to reduce interfacial sub-oxides and lower hydrogen pre-bake temperatures for RPCVD Si epitaxy Brabant PD, Shinriki M, Vininski J, Raynor MW, Torres R, Francis TA Journal of Crystal Growth, 381, 33, 2013 |
| 2 |
High strain embedded-SiGe via low temperature reduced pressure chemical vapor deposition He H, Brabant P, Chung K, Shinriki M, Adam T, Reznicek A, Sadana D, Hasaka S, Francis T Thin Solid Films, 520(8), 3175, 2012 |
| 3 |
Gas phase particle formation and elimination on Si (100) in low temperature reduced pressure chemical vapor deposition silicon-based epitaxial layers Shinriki M, Chung K, Hasaka S, Brabant P, He H, Adam TN, Sadana D Thin Solid Films, 520(8), 3190, 2012 |