화학공학소재연구정보센터
검색결과 : 2건
No. Article
1 Dual exposure, two-photon, conformal phase mask lithography for three dimensional silicon inverse woodpile photonic crystals
Shir DJ, Nelson EC, Chanda D, Brzezinski A, Braun PV, Rogers JA, Wiltzius P
Journal of Vacuum Science & Technology B, 28(4), 783, 2010
2 Three-dimensional nanofabrication with elastomeric phase masks
Shir DJ, Jeon S, Liao H, Highland M, Cahill DG, Su MF, El-Kady IF, Christodoulou CG, Bogart GR, Hamza AV, Rogers JA
Journal of Physical Chemistry B, 111(45), 12945, 2007