검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Hardness and surface roughness of hydrogenated amorphous carbon-based films synthesized by atmospheric pressure-plasma enhanced chemical vapor deposition at low temperature Noborisaka M, Horikoshi R, Nagashima S, Shirakura A, Suzuki T Thin Solid Films, 527, 114, 2013 |
| 2 |
Optical emission spectroscopy as a process control tool during plasma enhanced chemical vapor deposition of microcrystalline silicon thin films Du CC, Wei TC, Chang CH, Lee SL, Liang MW, Huang JR, Wu CH, Shirakura A, Morisawa R, Suzuki T Thin Solid Films, 520(11), 3999, 2012 |
| 3 |
Diamond-like carbon films for PET bottles and medical applications Shirakura A, Nakaya M, Koga Y, Kodama H, Hasebe T, Suzuki T Thin Solid Films, 494(1-2), 84, 2006 |