검색결과 : 6건
| No. | Article |
|---|---|
| 1 |
Batch sequencing for run-to-run control: Application to chemical mechanical polishing Chen YH, Su AJ, Shiu SJ, Yu CC, Shen SH Industrial & Engineering Chemistry Research, 44(13), 4676, 2005 |
| 2 |
Robust identification of continuous parametric models based on multiple sinusoidal testing under slow or periodic disturbances Hwang SH, Ling HC, Shiu SJ Industrial & Engineering Chemistry Research, 43(19), 6125, 2004 |
| 3 |
Multivariable control of multizone chemical mechanical polishing Shiu SJ, Yu CC, Shen SH Journal of Vacuum Science & Technology B, 22(4), 1679, 2004 |
| 4 |
Automatic tuning of systems with one or two unstable poles Shiu SJ, Hwang SH, Lin ML Chemical Engineering Communications, 167, 51, 1998 |
| 5 |
Sequential design method for multivariable decoupling and multiloop PID controllers Shiu SJ, Hwang SH Industrial & Engineering Chemistry Research, 37(1), 107, 1998 |
| 6 |
A New Autotuning Method with Specifications on Dominant Pole-Placement Hwang SH, Shiu SJ International Journal of Control, 60(2), 265, 1994 |