검색결과 : 11건
| No. | Article |
|---|---|
| 1 |
The effects of vacuum-ultraviolet radiation on defects in low-k organosilicate glass (SiCOH) as measured with electron-spin resonance Xue PP, Pei DF, Zheng HF, Li WY, Afanas'ev VV, Baklanov MR, de Marneffe JF, Lin YH, Fung HS, Chen CC, Nishi Y, Shohet JL Thin Solid Films, 616, 23, 2016 |
| 2 |
Charging response of back-end-of-the-line barrier dielectrics to VUV radiation Sinha H, Lauer JL, Antonelli GA, Nishi Y, Shohet JL Thin Solid Films, 520(16), 5300, 2012 |
| 3 |
Changes to Charge and Defects in Dielectrics from Ion and Photon Fluences during Plasma Exposure Ren H, Nishi Y, Shohet JL Electrochemical and Solid State Letters, 14(3), H107, 2011 |
| 4 |
Effect of the dielectric-substrate interface on charge accumulation from vacuum ultraviolet irradiation of low-k porous organosilicate dielectrics Sinha H, Sehgal A, Ren H, Nichols MT, Tomoyasu M, Russell NM, Nishi Y, Shohet JL Thin Solid Films, 519(16), 5464, 2011 |
| 5 |
Charge Trapping within UV and Vacuum UV Irradiated Low-k Porous Organosilicate Dielectrics Lauer JL, Sinha H, Nichols MT, Antonelli GA, Nishi Y, Shohet JL Journal of the Electrochemical Society, 157(8), G177, 2010 |
| 6 |
Reflectance and substrate currents of dielectric layers under vacuum ultraviolet irradiation Sinha H, Straight DB, Lauer JL, Fuller NC, Engelmann SU, Zhang Y, Antonelli GA, Severson M, Nishi Y, Shohet JL Journal of Vacuum Science & Technology A, 28(6), 1316, 2010 |
| 7 |
Measuring vacuum ultraviolet radiation-induced damage Lauer JL, Shohet JL, Hansen RW Journal of Vacuum Science & Technology A, 21(4), 1253, 2003 |
| 8 |
X-Ray-Imaging During Plasma-Source Ion-Implantation Piper M, Shohet JL, Booske JH, Chew KH, Zhang L, Sandstrom P, Jacobs J Plasma Chemistry and Plasma Processing, 16(1), 141, 1996 |
| 9 |
Silicon-Oxide Deposition in an Electron-Cyclotron-Resonance Plasma with Microwave Spectroscopic Monitoring of SiO Chew KH, Chen J, Woods RC, Shohet JL Journal of Vacuum Science & Technology A, 13(5), 2483, 1995 |
| 10 |
Computer-Simulation of Mass-Selective Plasma-Source Ion-Implantation Shohet JL, Wickesberg EB, Kushner MJ Journal of Vacuum Science & Technology A, 12(4), 1380, 1994 |