검색결과 : 4건
No. | Article |
---|---|
1 |
Quantitative evaluation of strain relaxation in annealed sputter-deposited AlN film Tanaka S, Shojiki K, Uesugi K, Hayashi Y, Miyake H Journal of Crystal Growth, 512, 16, 2019 |
2 |
Curvature-controllable and crack-free AlN/sapphire templates fabricated by sputtering and high-temperature annealing Hayashi Y, Tanigawa K, Uesugi K, Shojiki K, Miyake H Journal of Crystal Growth, 512, 131, 2019 |
3 |
Fabrication of AlN templates on SiC substrates by sputtering-deposition and high-temperature annealing Uesugi K, Hayashi Y, Shojiki K, Xiao SY, Nagamatsu K, Yoshida H, Miyake H Journal of Crystal Growth, 510, 13, 2019 |
4 |
Fabrication of Cu2ZnSnS4 thin films using a Cu-Zn-Sn-O amorphous precursor and supercritical fluid sulfurization Nakayasu Y, Tomai T, Oka N, Shojiki K, Kuboya S, Katayama R, Sang LW, Sumiya M, Honma I Thin Solid Films, 638, 244, 2017 |