검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Fabrication of parallel-plate nanomirror arrays for extreme ultraviolet maskless lithography Shroff Y, Chen YJ, Oldham W Journal of Vacuum Science & Technology B, 19(6), 2412, 2001 |
| 2 |
Maskless extreme ultraviolet lithography Choksi N, Pickard DS, McCord M, Pease RFW, Shroff Y, Chen YJ, Oldham W, Markle D Journal of Vacuum Science & Technology B, 17(6), 3047, 1999 |