화학공학소재연구정보센터
검색결과 : 3건
No. Article
1 Facet engineering for SiGe/Si stressors in advanced CMOS technology
Kasim J, Reichel C, Dilliway G, Bai B, Zakowsky N
Solid-State Electronics, 110, 19, 2015
2 Migration of CrSi2 nanocrystals through nanopipes in the silicon cap
Galkin NG, Dozsa L, Chusovitin EA, Pecz B, Dobos L
Applied Surface Science, 256(23), 7331, 2010
3 Effects of Si-cap layer thinning and Ge segregation on the characteristics of Si/SiGe/Si heterostructure pMOSFETs
Song YJ, Lim JW, Kim SH, Bae HC, Kang JY, Park KW, Shim KH
Solid-State Electronics, 46(11), 1983, 2002