검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
The effects of UV radiation on SiC(O)N/SiOC(-H) thin films grown on Si substrates using plasma-enhanced atomic layer deposition Navamathavan R, Kim CY, Lee HJ, Yu Y, Choi CK Thin Solid Films, 547, 151, 2013 |
| No. | Article |
|---|---|
| 1 |
The effects of UV radiation on SiC(O)N/SiOC(-H) thin films grown on Si substrates using plasma-enhanced atomic layer deposition Navamathavan R, Kim CY, Lee HJ, Yu Y, Choi CK Thin Solid Films, 547, 151, 2013 |