검색결과 : 1건
No. | Article |
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1 |
Structural characteristics of 3C-SiC films epitaxially grown on the Si/Si3N4/SiO2 system Zappe S, Moller H, Krotz G, Eickhoff M, Skorupa W, Obermeier E, Stoemenos J Materials Science Forum, 338-3, 529, 2000 |
No. | Article |
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1 |
Structural characteristics of 3C-SiC films epitaxially grown on the Si/Si3N4/SiO2 system Zappe S, Moller H, Krotz G, Eickhoff M, Skorupa W, Obermeier E, Stoemenos J Materials Science Forum, 338-3, 529, 2000 |