검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Effect of thermal annealing on the properties of a-SiCN : H films by hot wire chemical vapor deposition using hexamethyldisilazane Limmanee A, Otsubo M, Sugiura T, Sato T, Miyajima S, Yamada A, Konagai M Thin Solid Films, 516(5), 652, 2008 |