검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Ta/SiCN bilayer barrier for Cu-ultra low k integration Zhang DH, Yang LY, Li CY, Lu PW, Foo PD Thin Solid Films, 504(1-2), 235, 2006 |
| No. | Article |
|---|---|
| 1 |
Ta/SiCN bilayer barrier for Cu-ultra low k integration Zhang DH, Yang LY, Li CY, Lu PW, Foo PD Thin Solid Films, 504(1-2), 235, 2006 |