검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Effect of Si-OH group on characteristics of SiCOH films prepared by decamethylcyclopentasiloxane electron cyclotron resonance plasma Ye C, Ning ZY, Wang TT, Yu XZ, Xin Y Thin Solid Films, 496(2), 221, 2006 |
| No. | Article |
|---|---|
| 1 |
Effect of Si-OH group on characteristics of SiCOH films prepared by decamethylcyclopentasiloxane electron cyclotron resonance plasma Ye C, Ning ZY, Wang TT, Yu XZ, Xin Y Thin Solid Films, 496(2), 221, 2006 |