화학공학소재연구정보센터
검색결과 : 2건
No. Article
1 Thermal stability investigation of SiGe virtual substrate with a thin Ge buffer layer grown on Si substrate
Qi DF, Liu HH, Chen SY, Li C, Lai HK
Journal of Crystal Growth, 375, 115, 2013
2 High quality SiGe electronic material grown by low energy plasma enhanced chemical vapour deposition
Chrastina D, Isella G, Rossner B, Bollani M, Muller E, Hackbarth T, von Kanel H
Thin Solid Films, 459(1-2), 37, 2004