검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Deposition rate of SiN film grown by using a pulsed-PECVD at room-temperature Kim S, Kim B Current Applied Physics, 10(3), S372, 2010 |
| 2 |
Impact of radio frequency source power-induced ion energy on a refractive index of SiN film deposited by a pulsed-PECVD at room temperature Kim S, Kim B Thin Solid Films, 518(22), 6554, 2010 |