검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
NUMERICAL AMALYSIS OF LPCVD OF SiO2 FILMS FROM DIETHYLSILANE/OXYGEN Kim EJ, Kim CJ, Chung KY Korean Journal of Chemical Engineering, 16(1), 12, 1999 |
| 2 |
MODELING OF SiO2 CVD FROM TEOS/OZONE IN A SEPARATE - GAS -INJECTION REACTOR Kim EJ, Gill WN Korean Journal of Chemical Engineering, 15(1), 56, 1998 |
| 3 |
ECR플리즈마를 이용한 실리콘 산화막의 제조 전법주, 오인환, 임태훈, 정일현 HWAHAK KONGHAK, 35(6), 900, 1997 |