검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Microtrench of oxynitride thin films in C2F6 inductively coupled plasma Kim B, Lee BT Applied Surface Science, 253(3), 1464, 2006 |
| 2 |
Theoretical study on the initial processes of nitridation of silicon thin film Yoshida S, Doi K, Nakamura K, Tachibana A Applied Surface Science, 216(1-4), 141, 2003 |