검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Enhancement of FinFET performance using 25-nm-thin sidewall spacer grown by atomic layer deposition Endo K, Ishikawa Y, Matsukawa T, Liu YX, O'uchi S, Sakamoto K, Tsukada J, Yamauchi H, Masahara M Solid-State Electronics, 74, 13, 2012 |