검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Surface reaction of silicon chlorides during atomic layer deposition of silicon nitride Yusup LL, Park JM, Mayangsari TR, Kwon YK, Lee WJ Applied Surface Science, 432, 127, 2018 |
| No. | Article |
|---|---|
| 1 |
Surface reaction of silicon chlorides during atomic layer deposition of silicon nitride Yusup LL, Park JM, Mayangsari TR, Kwon YK, Lee WJ Applied Surface Science, 432, 127, 2018 |