| 1 |
RF Magnetron Sputtering공정에 의해 IT유리에 적층시킨 Silicon Nitride 박막의 특성
손정일, 김광수
Korean Journal of Materials Research, 30(4), 169, 2020 |
| 2 |
2파장 펌프-프로브 기법을 이용한 질화규소 박막의 열물성 평가
김윤영
Korean Journal of Materials Research, 29(9), 547, 2019 |
| 3 |
The hybrid graphene multilayer system (graphene/SiN/graphene) coupled with titanium alloy (Ti6Al4V) - structural, mechanical and corrosion characterisation
Kalisz M, Grobelny M, Zdrojek M, Swiniarski M, Judek J
Thin Solid Films, 596, 101, 2015 |
| 4 |
Study of growth kinetics and depth resolved composition of a-SiNx: H thin films by resonant soft X-ray reflectivity at the Si L-2,L-3-edge
Bommali RK, Modi MH, Zhou S, Ghosh S, Srivastava P
Applied Surface Science, 305, 173, 2014 |
| 5 |
Ultrafast deposition of silicon nitride and semiconductor silicon thin films by hot wire chemical vapor deposition
Schropp REI, van der Werf CHM, Verlaan V, Rath JK, Li H
Thin Solid Films, 517(10), 3039, 2009 |
| 6 |
Preparation of SiNx gate-insulating films for bottom-gate type TFTs by Cat-CVD method
Seri Y, Masuda A, Matsumura H
Thin Solid Films, 501(1-2), 307, 2006 |
| 7 |
Effect of deposition conditions and dielectric plasma treatments on the electrical properties of microcrystalline silicon TFTs
Kasouit S, Cabarrocas PRI, Vanderhaghen R, Bonassieux Y, Elyaakoubi M, French I, Rocha J, Vitoux B
Thin Solid Films, 427(1-2), 67, 2003 |
| 8 |
Hydrogen diffusion coefficient of silicon nitride thin films
Yu GC, Yen SK
Applied Surface Science, 201(1-4), 204, 2002 |
| 9 |
Hydrogen ion diffusion coefficient of silicon nitride thin films
Yu GT, Yen SK
Applied Surface Science, 202(1-2), 68, 2002 |
| 10 |
A Study on the Feasibility of Silicon Nitride Thin Film as Diffusion Barriers over IC Chip Packaging
Jo MC, Noh BI
Journal of Industrial and Engineering Chemistry, 8(5), 458, 2002 |
