검색결과 : 9건
| No. | Article |
|---|---|
| 1 |
Application of ellipsometry for the accurate oxide layer measurement on silicon spheres Busch I, Liu WD, Chen C, Luo ZY, Koenders L Applied Surface Science, 421, 624, 2017 |
| 2 |
High-efficiency micromorph solar cell with light management in tunnel recombination junction Fang J, Bai LS, Li TT, Hou GF, Li BZ, Wei CC, Wang GC, Zhang DK, Zhao Y, Zhang XD Solar Energy Materials and Solar Cells, 155, 469, 2016 |
| 3 |
Probing mechanical properties of thin film and ceramic materials in micro- and nano-scale using indentation techniques Charitidis CA Applied Surface Science, 256(24), 7583, 2010 |
| 4 |
Thickness measurement of SiO2 films thinner than 1 nm by X-ray photoelectron spectroscopy Kim KJ, Park KT, Lee JW Thin Solid Films, 500(1-2), 356, 2006 |
| 5 |
Plasma enhanced chemical vapor deposition of nitrogen-incorporated silicon oxide films using TMOS/N2O gas Kang MS, Chung TH, Kim Y Thin Solid Films, 506, 45, 2006 |
| 6 |
Film strain and compositional changes in thermally nitrided silicon dioxide thin films Dasgupta A, Jin DU, Takoudis CG Thin Solid Films, 472(1-2), 270, 2005 |
| 7 |
Cathodoluminescence study of Si/SiO2 interface structure Zamoryarskaya MV, Sokolov VI, Plotnikov V Applied Surface Science, 234(1-4), 214, 2004 |
| 8 |
Structure characterization of carbon and fluorine-doped silicon oxide films with low dielectric constant Ding SJ, Chen L, Wan XG, Wang PF, Zhang JY, Zhang DW, Wang JT Materials Chemistry and Physics, 71(2), 125, 2001 |
| 9 |
저온 산화공정에 의해 낮은 Dit를 갖는 실리콘 산화막의 제조 전법주, 정일현 Journal of the Korean Industrial and Engineering Chemistry, 9(7), 990, 1998 |