검색결과 : 5건
| No. | Article |
|---|---|
| 1 |
Blanking characteristics of a miniature electron beam column Silver CS, Spallas JP, Muray LP Journal of Vacuum Science & Technology B, 28(6), C6G1, 2010 |
| 2 |
Multiple beam sub-80-nm lithography with miniature electron beam column arrays Silver CS, Spallas JP, Muray LP Journal of Vacuum Science & Technology B, 25(6), 2258, 2007 |
| 3 |
Arrayed miniature electron beam columns for mask making Spallas JP, Silver CS, Muray LP Journal of Vacuum Science & Technology B, 24(6), 2892, 2006 |
| 4 |
Sub-100-nm lithography with miniature electron beam columns Muray LP, Silver CS, Spallas JP Journal of Vacuum Science & Technology B, 24(6), 2945, 2006 |
| 5 |
Silicon photodiodes for low-voltage electron detection in scanning electron microscopy and electron beam lithography Silver CS, Spallas JP, Muray LP Journal of Vacuum Science & Technology B, 24(6), 2951, 2006 |