화학공학소재연구정보센터
검색결과 : 3건
No. Article
1 Ultra-thin gate oxide reliability projections
Weir BE, Alam MA, Silverman PJ, Baumann F, Monroe D, Bude JD, Timp GL, Hamad A, Ma Y, Brown MM, Hwang D, Sorsch TW, Ghetti A, Wilk GD
Solid-State Electronics, 46(3), 321, 2002
2 Electrical properties of cobalt and copper contamination in processed silicon
Benton JL, Boone T, Jacobson DC, Silverman PJ, Rosamilia JM, Rafferty CS, Weinzierl S, Vu B
Journal of the Electrochemical Society, 148(6), G326, 2001
3 Effect of tensile strain on B-type step energy on Si(001)-(2x1) surfaces determined by switch-kink counting
Heller ER, Jones DE, Pelz JP, Xie YH, Silverman PJ
Journal of Vacuum Science & Technology A, 17(4), 1663, 1999