검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Extending Reaction Mechanism Generator to Silicon Hydride Chemistry Slakman BL, Simka H, Reddy H, West RH Industrial & Engineering Chemistry Research, 55(49), 12507, 2016 |
| 2 |
Virtual integrated processing for integrated circuit manufacturing Chalupa R, Jiang L, Simka H, Shankar S, Thakurta D Journal of Vacuum Science & Technology A, 25(4), 1013, 2007 |
| 3 |
Computational Chemistry Predictions of Kinetics and Major Reaction Pathways for Germane Gas-Phase Reactions Simka H, Hierlemann M, Utz M, Jensen KF Journal of the Electrochemical Society, 143(8), 2646, 1996 |