검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Charging response of back-end-of-the-line barrier dielectrics to VUV radiation Sinha H, Lauer JL, Antonelli GA, Nishi Y, Shohet JL Thin Solid Films, 520(16), 5300, 2012 |
| 2 |
Effect of the dielectric-substrate interface on charge accumulation from vacuum ultraviolet irradiation of low-k porous organosilicate dielectrics Sinha H, Sehgal A, Ren H, Nichols MT, Tomoyasu M, Russell NM, Nishi Y, Shohet JL Thin Solid Films, 519(16), 5464, 2011 |
| 3 |
Charge Trapping within UV and Vacuum UV Irradiated Low-k Porous Organosilicate Dielectrics Lauer JL, Sinha H, Nichols MT, Antonelli GA, Nishi Y, Shohet JL Journal of the Electrochemical Society, 157(8), G177, 2010 |
| 4 |
Reflectance and substrate currents of dielectric layers under vacuum ultraviolet irradiation Sinha H, Straight DB, Lauer JL, Fuller NC, Engelmann SU, Zhang Y, Antonelli GA, Severson M, Nishi Y, Shohet JL Journal of Vacuum Science & Technology A, 28(6), 1316, 2010 |