화학공학소재연구정보센터
검색결과 : 5건
No. Article
1 Physical mechanisms of macroparticles number density decreasing on a substrate immersed in vacuum arc plasma at negative high-frequency short-pulsed biasing
Ryabchikov AI, Sivin DO, Bumagina AI
Applied Surface Science, 305, 487, 2014
2 Reprint of: Physical mechanisms of macroparticles number density decreasing on a substrate immersed in vacuum arc plasma at negative high-frequency short-pulsed biasing (Reprinted from J. Appl. Phys. vol 305, pg 487-491, 2014)
Ryabchikov AI, Sivin DO, Bumagina AI
Applied Surface Science, 310, 115, 2014
3 Investigation of the possibility of unfiltered aluminium vacuum arc plasma application for high-frequency short-pulse plasma immersion ion implantation
Sivin DO, Ryabchikov AI, Bumagina AI, Bolbasov EN, Daneikina NV
Applied Surface Science, 310, 120, 2014
4 Titanium macroparticles density decreasing on the sample, immersed in plasma, at repetitively pulsed biasing
Sivin DO, Ryabchikov AI, Bumagina AI, Tupikova US, Daneikina NV
Applied Surface Science, 310, 126, 2014
5 Application of high frequency short-pulsed negative biasing for the decreasing of macroparticle content on substrate immersed in vacuum arc plasma
Ryabchikov AI, Sivin DO, Bumagina AI
Applied Surface Science, 310, 130, 2014