검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Direct comparison of two-dimensional dopant profiles by scanning capacitance microscopy with TSUPREM4 process simulation McMurray JS, Kim J, Williams CC, Slinkman J Journal of Vacuum Science & Technology B, 16(1), 344, 1998 |
| 2 |
Imaging Integrated-Circuit Dopant Profiles with the Force-Based Scanning Kelvin Probe Microscope Hochwitz T, Henning AK, Levey C, Daghlian C, Slinkman J, Never J, Kaszuba P, Gluck R, Wells R, Pekarik J, Finch R Journal of Vacuum Science & Technology B, 14(1), 440, 1996 |
| 3 |
Capacitive Effects on Quantitative Dopant Profiling with Scanned Electrostatic Force Microscopes Hochwitz T, Henning AK, Levey C, Daghlian C, Slinkman J Journal of Vacuum Science & Technology B, 14(1), 457, 1996 |