검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Pressure dependence of (Ti, Al)N film growth on inner walls of small holes in high-power impulse magnetron sputtering Shimizu T, Komiya H, Teranishi Y, Morikawa K, Nagasaka H, Yang M Thin Solid Films, 624, 189, 2017 |
| 2 |
Variation of local chemical compositions of (Ti, Al)N films on inner wall of small hole deposited by high-power impulse magnetron sputtering Komiya H, Shimizu T, Teranishi Y, Morikawa K, Yang M Thin Solid Films, 644, 99, 2017 |