검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Analysis of Coulomb and Johnsen-Rahbek electrostatic chuck performance for extreme ultraviolet lithography Sogard MR, Mikkelson AR, Nataraju M, Turner KT, Engelstad RL Journal of Vacuum Science & Technology B, 25(6), 2155, 2007 |
| 2 |
Wafer heating analysis for electron-beam projection lithography Chang J, Nellis GF, Engelstad RL, Lovell EG, Sogard MR Journal of Vacuum Science & Technology B, 21(6), 2657, 2003 |