화학공학소재연구정보센터
검색결과 : 3건
No. Article
1 Solid phase growth of NiSi in polycrystalline Si on SiO2 with Cl plasma containing NiCl
Kanomata K, Momiyama K, Kubota S, Suzuki T, Hirose F
Applied Surface Science, 268, 141, 2013
2 Solid-phase growth of beta-FeSi2 in thick Fe film on Si(111) substrates
Momiyama K, Kanomata K, Suzuki T, Kubota S, Hirose F
Thin Solid Films, 525, 208, 2012
3 Ge-dependent morphological change in poly-SiGe formed by Ni-mediated crystallization
Sadoh T, Kanno H, Kenjo A, Miyao M
Applied Surface Science, 224(1-4), 227, 2004