검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
First lithographic results from the extreme ultraviolet Engineering Test Stand Chapman HN, Ray-Chaudhuri AK, Tichenor DA, Replogle WC, Stulen RH, Kubiak GD, Rockett PD, Klebanoff LE, O'Connell D, Leung AH, Jefferson KL, Wronosky JB, Taylor JS, Hale LC, Blaedel K, Spiller EA, Sommargren GE, Folta JA, Sweeney DW, Gullikson EM, Naulleau P, Goldberg KA, Bokor J, Attwood DT, Mickan U, Hanzen R, Panning E, Yan PY, Gwyn CW, Lee SH Journal of Vacuum Science & Technology B, 19(6), 2389, 2001 |
| 2 |
Precision Optical Aspheres for Extreme-Ultraviolet Lithography Kania DR, Gaines DP, Sweeney DS, Sommargren GE, Lafontaine B, Vernon SP, Tichenor DA, Bjorkholm JE, Zernike F, Kestner RN Journal of Vacuum Science & Technology B, 14(6), 3706, 1996 |
| 3 |
Progress Towards Lambda/20 Extreme-Ultraviolet Interferometry Goldberg KA, Beguiristain R, Bokor J, Medecki H, Attwood DT, Jackson K, Tejnil E, Sommargren GE Journal of Vacuum Science & Technology B, 13(6), 2923, 1995 |