검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Fabrication of TaOxNy thin films by reactive ion beam-assisted ac double magnetron sputtering for optical applications Bah ST, Ba COF, D'Auteuil M, Ashrit PV, Soreli L, Vallee R Thin Solid Films, 615, 351, 2016 |
| No. | Article |
|---|---|
| 1 |
Fabrication of TaOxNy thin films by reactive ion beam-assisted ac double magnetron sputtering for optical applications Bah ST, Ba COF, D'Auteuil M, Ashrit PV, Soreli L, Vallee R Thin Solid Films, 615, 351, 2016 |