검색결과 : 5건
| No. | Article |
|---|---|
| 1 |
Heavy ion projection beam system for material modification at high ion energy Weidenmuller U, Meijer J, Stephan A, Bukow HH, Sossna E, Volland B, Rangelow IW Journal of Vacuum Science & Technology B, 20(1), 246, 2002 |
| 2 |
Mechanical, geometrical, and electrical characterization of silicon membranes for open stencil masks Sossna E, Degen A, Rangelow IW, Drzik M, Hudek P, Tiwald TE, Woollam JA Journal of Vacuum Science & Technology B, 19(6), 2665, 2001 |
| 3 |
Thickness analysis of silicon membranes for stencil masks Sossna E, Kassing R, Rangelow IW, Herzinger CM, Tiwald TE, Woollam JA, Wagner T Journal of Vacuum Science & Technology B, 18(6), 3259, 2000 |
| 4 |
Comparison of silicon stencil mask distortion measurements with finite element analysis Ehrmann A, Struck T, Chalupka A, Haugeneder E, Loschner H, Butschke J, Irmscher M, Letzkus F, Springer R, Degen A, Rangelow IW, Shi F, Sossna E, Volland B, Engelstad R, Lovell E, Tejeda R Journal of Vacuum Science & Technology B, 17(6), 3107, 1999 |
| 5 |
p-n junction-based wafer flow process for stencil mask fabrication Rangelow IW, Shi F, Volland B, Sossna E, Petrashenko A, Hudek P, Sunyk R, Butschke J, Letzkus F, Springer R, Ehrmann A, Gross G, Kaesmaier R, Oelmann A, Struck T, Unger G, Chalupka A, Haugeneder E, Lammer G, Loschner H, Tejeda R, Lovell E, Engelstad R Journal of Vacuum Science & Technology B, 16(6), 3592, 1998 |