검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Substrate and coating defect planarization strategies for high-laser-fluence multilayer mirrors Stolz CJ, Wolfe JE, Mirkarimi PB, Folta JA, Adams JJ, Menor MG, Teslich NE, Soufli R, Menoni CS, Patel D Thin Solid Films, 592, 216, 2015 |
| 2 |
Sub-70 nm extreme ultraviolet lithography at the Advanced Light Source static microfield exposure station using the engineering test stand set-2 optic Naulleau P, Goldberg KA, Anderson EH, Attwood D, Batson P, Bokor J, Denham P, Gullikson E, Harteneck B, Hoef B, Jackson K, Olynick D, Rekawa S, Salmassi F, Blaedel K, Chapman H, Hale L, Mirkarimi P, Soufli R, Spiller E, Sweeney D, Taylor J, Walton C, O'Connell D, Tichenor D, Gwyn CW, Yan PY, Zhang GJ Journal of Vacuum Science & Technology B, 20(6), 2829, 2002 |