검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Diode laser measurements of CFx species in a low-pressure, high-density plasma reactor Littau ME, Sowa MJ, Cecchi JL Journal of Vacuum Science & Technology A, 20(5), 1603, 2002 |
| 2 |
Fluorocarbon polymer deposition kinetics in a low-pressure, high density, inductively coupled plasma reactor Sowa MJ, Littau ME, Pohray V, Cecchi JL Journal of Vacuum Science & Technology A, 18(5), 2122, 2000 |
| 3 |
Uniformity of Radio-Frequency Bias Voltages Along Conducting Surfaces in a Plasma Stevens JE, Sowa MJ, Cecchi JL Journal of Vacuum Science & Technology A, 14(1), 139, 1996 |
| 4 |
Helicon Plasma Source Excited by a Flat Spiral Coil Stevens JE, Sowa MJ, Cecchi JL Journal of Vacuum Science & Technology A, 13(5), 2476, 1995 |