검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Evaluation of the cleanliness of the ion-assisted Mo-Si deposition process for extreme ultraviolet lithography Hau-Riege SP, Mirkarimi PB, Walton CC, Sperry V, Larson C Journal of Vacuum Science & Technology B, 21(6), 2466, 2003 |