화학공학소재연구정보센터
검색결과 : 3건
No. Article
1 Adsorption of precursor molecules in the CVD process of (Ba;Sr)titanate simulated by ab-initio calculations
Metzger R, Werner C, Spitzer A
Thin Solid Films, 365(2), 242, 2000
2 Equipment Simulation of SiGe Heteroepitaxy - Model Validation by Ab-Initio Calculations of Surface-Diffusion Processes
Hierlemann M, Werner C, Spitzer A
Journal of Vacuum Science & Technology B, 15(4), 935, 1997
3 A Novel Capacitor Technology-Based on Porous Silicon
Lehmann V, Honlein W, Reisinger H, Spitzer A, Wendt H, Willer J
Thin Solid Films, 276(1-2), 138, 1996