검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Enhanced Adhesion of Copper to Dielectrics via Titanium and Chromium Additions and Sacrificial Reactions Russell SW, Rafalski SA, Spreitzer RL, Li J, Moinpour M, Moghadam F, Alford TL Thin Solid Films, 262(1-2), 154, 1995 |
| 2 |
Passivation of Cu via Refractory-Metal Nitridation in an Ammonia Ambient Adams D, Alford TL, Theodore ND, Russell SW, Spreitzer RL, Mayer JW Thin Solid Films, 262(1-2), 199, 1995 |