검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Characterization of chemically amplified resist for X-ray lithography by Fourier transform infrared spectroscopy Tan TL, Wong D, Lee P, Rawat RS, Springham S, Patran A Thin Solid Films, 504(1-2), 113, 2006 |
| No. | Article |
|---|---|
| 1 |
Characterization of chemically amplified resist for X-ray lithography by Fourier transform infrared spectroscopy Tan TL, Wong D, Lee P, Rawat RS, Springham S, Patran A Thin Solid Films, 504(1-2), 113, 2006 |